Certified & Remanufactured
Wafer Manufacturing
Surfscan® Series
Unpatterned Wafer Defect Inspection Systems
The Surfscan® unpatterned wafer inspection systems identify defects and surface quality issues that affect the performance and reliability of semiconductor devices. It supports IC, OEM, materials and wafer manufacturing by qualifying and monitoring tools, processes and materials, by quickly isolating surface defects.
Related Products
Surfscan SP2XP:
Unpatterned wafer inspection system targeted for technologies ≥ 45nm design node.
Download brochure.Surfscan SP2:
Unpatterned wafer inspection system targeted for technologies ≥ 65nm design node.
Download brochure.Surfscan SP1DLS Pro:
Unpatterned wafer inspection system targeted for technologies ≥ 90nm design node.
Download brochure.Surfscan SP1TBI Pro:
Unpatterned wafer inspection system targeted for technologies ≥ 130nm design node.
Download brochure.KLA has a comprehensive portfolio of defect inspection and wafer geometry systems for advanced wafer manufacturing, including additional Surfscan® unpatterned wafer inspection systems.
Certified & Remanufactured