Closeup of a circuit board

Expanding the Boundaries of AI

Artificial Intelligence and semiconductor processes evolve in parallel

Revolutionary Defect Discovery

As our first process control system with integrated AI, the eSL10™ e-beam patterned wafer defect inspector employs SMARTs™ deep learning algorithms that discriminate between extremely subtle defect signals and surrounding pattern and process noise. With AI, the eSL10 can adapt to evolving inspection requirements, isolating the defects most critical to leading-edge device performance.


Reinvented Defect Classification

Inspection systems capture critical defects for reticles, wafers, packages and PCBs. Reviewing optical and e-beam defect images has traditionally involved human intervention to verify defect types. AI systems learn and adapt to quickly sort and classify defects with reduced errors and without slowing down production.

Defect Inspection and Review

Reticle Decision Center

Smart Manufacturing

The future of smart IC manufacturing will utilize the connectivity in the factory to drive automated optimization. AI systems can process massive data sets to gain insight into trends and potential excursions and use this knowledge to make decisions. To maintain quality, yield and productivity, full visibility of the manufacturing process can provide the traceability required to drive continuous improvements.

Improved reliability for automotive semiconductors with I-PAT®

AI Highlights

Learn how our products can help you achieve more.

Contact Us

Receive the latest KLA AI news, papers, events, and more

Topic Landing Form
Data Transfer *

Explore More Solutions


The Internet of Things is expanding quickly, and the demand for smart devices is growing with it! Our solutions drive increasing production to match it.

Learn more


Navigation, infotainment, driver assistance, autonomous driving, flying cars! Our solutions revolutionize quality control for the ICs that power the future of automotive.

Learn more

5G Technology

5G is bringing higher data speeds and lower latency to the next generation of devices! Our solutions help ensure the necessary yield and reliability.

Learn more

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.