Wafer Manufacturing
Wafer Manufacturing
KLA’s wafer manufacturing portfolio includes defect inspection and review, metrology, data management and in situ process monitoring systems that help manufacturers manage quality throughout the wafer fabrication process. KLA's wafer manufacturing systems support process development, production monitoring and final quality check of a broad range of substrate types and sizes including silicon, prime silicon, SOI, sapphire, glass, GaAs, SiC, GaN, InP, GaSb, Ge, LiTaO3, LiNBO3, and epitaxial waters. Wafer manufacturers use KLA’s array of products to help accelerate their development and product ramp cycle, to achieve higher wafer quality, and to improve overall profitability in the wafer manufacturing process.
