Chemistry Process Control

KLA’s chemistry process control products support multiple applications for chip manufacturing, including analysis and monitoring of critical damascene, clean and wet etch processes. Chemistry analysis systems help engineers qualify processes during development, and seamlessly integrate with process tools for online monitoring during high volume production. The information produced by our chemistry process control systems allows chip manufacturers to quickly optimize processes and achieve higher yield and reliability.

ECI

Chemistry Process Monitoring

ECI Technology provides chemistry process monitoring products that support chip manufacturing, including:

Products that support online monitoring and precise control of wet metallization processes, including copper and cobalt metallization: https://www.ecitechnology.com/products/semiconductor/interconnects/
A range of chemistry analyzers, from benchtop chemical monitoring systems to fully automated online monitors, that support critical etch and cleaning processes: https://www.ecitechnology.com/products/semiconductor/surface-preparation/

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