Chemistry Process Control

KLA’s chemistry process control products support multiple applications for chip manufacturing, including analysis and monitoring of critical damascene, clean and wet etch processes. Chemistry analysis systems help engineers qualify processes during development, and seamlessly integrate with process tools for online monitoring during high volume production. The information produced by our chemistry process control systems allows chip manufacturers to quickly optimize processes and achieve higher yield and reliability.


Chemistry Process Monitoring

ECI Technology provides chemistry process monitoring products that support chip manufacturing, including:

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