Process Control

Semiconductor process equipment manufacturers use KLA’s process control systems to understand process quality and to optimize tool performance. Used during process and tool development, KLA’s process control systems produce information used to visualize, diagnose and control process conditions – enabling the equipment manufacturers to fully characterize and understand their tools’ performance. Our inspection, metrology and in situ process monitoring solutions are also used to qualify process tool performance before shipment. KLA’s process control systems help equipment suppliers build reliable, production-worthy process tools.

Process Control Products

KLA’s comprehensive portfolio of process control products for Chip Manufacturing also support development and production of process tools for the semiconductor ecosystem. Our products that support process equipment manufacturers include:

  • Surfscan® unpatterned wafer inspection systems
  • SensArray® in situ process monitoring solutions
  • SpectraFilm™ films metrology systems
  • Axion® X-ray critical dimension (CD) and shape metrology system
  • SpectraShape™ optical critical dimension (CD) and shape metrology systems
  • And more...

Learn about our products available for semiconductor process equipment manufacturers in our Defect Inspection and Review, Metrology and In Situ Process Management product categories.

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