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Voyager® 1035: A Unique Combination of Deep Learning, Speed and Sensitivity

Sep 21, 2021 2 min read

Chip manufacturing is a journey of a thousand process steps. Each step requires extreme precision and control in order to efficiently and quickly travel from bare silicon to final functional chip. Our new Voyager® 1035 laser scanning patterned wafer inspector helps guide chip manufacturing by monitoring critical process steps during ramp and volume production. By finding and flagging critical defects inline, the Voyager 1035 inspector helps to ensure process steps stay on the path to successful chip production.

Voyager®1035 laser scanning patterned wafer inspection system

As an inline defect monitor for advanced logic and memory chip manufacturing, the Voyager 1035 provides an optimal balance of sensitivity, speed and cost of ownership. For critical process monitoring applications, the Voyager 1035 employs a unique architecture, deep learning algorithms and several advanced technologies to produce industry-best laser scanning sensitivity at high throughput. This ensures fab engineers receive the timely, actionable defect data needed to take the corrective actions required to keep chip production on track.

Voyager 1035 – Speed and Sensitivity at a CoO second to none

DefectWise® deep learning technology makes it quick and easy to separate real defects of interest from nuisance while improving sensitivity to DOI that matter

The landmark attribute of Voyager 1035 is DefectWise® deep learning technology. DefectWise provides fast, inline separation of defects of interest from pattern noise and nuisance defects, resulting in increased sensitivity and improved capture rate of key defects. By producing accurate defect binning results, DefectWise reduces the time required for fab engineers to understand and correct process excursions.

Other key features of the Voyager 1035 that drive sensitivity and productivity include the following:

  • Industry-unique oblique illumination and outside-the-lens design reduce inspection noise for improved capture of defects
  • Industry-largest total solid angle of collection produces more signal to critical defects while also capturing signal from more defect types
  • Three segregated channels enable data collection strategies that result in strong defect signal-to-noise
No Signal/Gap
Defect Detected
*Simulated SEM images
  • New sensors with a 30% improvement in QE (Quantum Efficiency) drive higher throughput and better sensitivity for lower dose inspection on delicate photoresists found in applications such as after develop inspection (ADI) and photo cell monitoring (PCM) for EUV lithography
  • A new pixel size option increases resolution by >20% over the previous-generation Voyager for improved sensitivity to very small, yield-relevant defect types

Voyager 1035 – New sensor technology works with a new pixel size to improve sensitivity and resolution resulting in a higher capture rate of tiny gap defects.

More information on how the Voyager 1035 supports the chip manufacturing journey can be found on the product page.

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