Candela® 8420 Surface Defect Inspection System

Candela® 8420 Surface Defect Inspection System

The Candela 8420 is a surface defect inspection system that uses multi-channel detection and rule-based defect binning to provide particle and scratch detection on opaque, translucent and transparent wafers such as Gallium Arsenide (GaAs), Indium Phosphide (InP), Lithium Tantalate, Lithium Niobate, glass, sapphire and other compound semiconductor materials. The 8420 surface defect inspection system employs proprietary OSA (optical surface analyzer) architecture to simultaneously measure scatter intensity, topographic variations, surface reflectivity and phase shift for automatic detection and classification of a broad range of defects of interest (DOI). Full-surface coverage is achieved in minutes, with the Candela 8420 surface defect inspection system to produce high resolution imaging and automated inspection reporting with defect classification and wafer maps.

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