defect inspection system

Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.

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sheet resistance mapping instrument

Sheet Resistance Measurement

The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise.

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nanoindenter nanomechanical testers


The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

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optical profilometer

Optical Profilers

The Profilm3D® and Zeta optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot measurement techniques.

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Stylus profilometer

Stylus Profilers

The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

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thin-film reflectometers

Thin-Film Thickness Reflectometers

The Filmetrics® thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.

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The KLA Instruments service group offers a global network of fast, responsive and flexible support options to accommodate your unique needs and maximize your uptime.

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ProfilmOnline® Analysis Software

ProfilmOnline from Filmetrics® is a free, browser-based application for storage, sharing, viewing, and analysis of 3D images generated by almost any 3D microscope, profilometer, or AFM.

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