Products
Automated Metrology
KLA Instruments automated metrology enables fab process control to quantify electrical properties, material deposited/removed, surface topography/roughness and critical dimensions. Automated metrology options include optical profilometry, stylus profilometry and film thickness mapping.
Filmetrics® Thin-Film Thickness Measurement Systems
The Filmetrics® thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, for both benchtop and production environments.
Filmetrics® Sheet Resistance Measurement Systems
The Filmetrics® benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise.
Filmetrics® and Zeta™ Optical Profilers
The Filmetrics® Profilm3D® and Zeta™ optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot™ measurement techniques for R&D and production environments.
Stylus Profilers
The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Nanoindenters
The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
Tools and Software
Filmetrics® Spectral Reflectance Calculator
Calculate reflectance caused by thin-film interference on up to 20 films using our popular reflectance calculator.
Filmetrics® Refractive Index Database
Search our comprehensive database for refractive index of common materials.
Filmetrics® Product Selection Guide
Use our product selection guide for additional guidance on choosing the right Filmetrics system.
Service
Service
The KLA Instruments service group offers a global network of fast, responsive and flexible support options to accommodate your unique needs and maximize your uptime.