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International Workshop on Advanced Patterning Solutions

KLA is a sponsor of the International Workshop on Advanced Patterning Solutions. In addition to KLA’s sponsorship, Bo Hua, KLA Corporation China, Product Marketing Manager will present “Broadband Plasma Optical Wafer Defect Inspection for Mask Qualification.”

IWAPS provides a forum for experts from industry and research institutions worldwide to present and discuss advanced patterning solutions and related challenges such as material, equipment, process, metrology, computational lithography and design optimization.

Event Date: Thursday, November 5 - Friday, November 6, 2020
Location: Nanjing Jinling Riverside Hotel, Chengdu, China

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