Films commonly fail because they either are not flexible enough or lack the mechanical strength to withstand stresses caused by point loading or substrate expansion. Nanoindentation of thin films provides an economical and easy way to measure properties of flexibility and mechanical strength through results of elastic modulus and hardness, respectively. This session is a live demonstration of dynamic nanoindentation with the KLA nanoindenter to characterize thin films for the most accurate results in elastic modulus and hardness. Ms. Hay demonstrates sample preparation, instrument configuration, test specification, execution and data interpretation.

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