KLA's Li Chen will present "Yield Challenges and Innovative Inspection and Metrology Solutions for Sub-10nm Manufacturing" in the Yield Challenges in Advanced Nodes session March 14. EDTM is becoming a premier conference for the electron devices community, providing a forum to focus on research and development from leading universities and manufacturing companies worldwide on a broad range of device-related topics including materials, processes, devices, packaging, modeling, reliability, manufacturing and yield.