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EDTM 2019

KLA's Li Chen will present "Yield Challenges and Innovative Inspection and Metrology Solutions for Sub-10nm Manufacturing" in the Yield Challenges in Advanced Nodes session March 14. EDTM is becoming a premier conference for the electron devices community, providing a forum to focus on research and development from leading universities and manufacturing companies worldwide on a broad range of device-related topics including materials, processes, devices, packaging, modeling, reliability, manufacturing and yield.

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