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ASMC 2021

KLA is once again a sponsor of the Advanced Semiconductor Manufacturing Conference. In addition to the sponsorship, KLA’s Graham Jensen will present “Missing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique”, Defect Inspection and Reduction (D1). We will also have a co-authored technical presentation, "The Use of Cross-Section Haze Measurements to Monitor Laser Spike Anneal (LSA) Stage Alignment", Equipment Optimization (EO).

ASMC is the leading international technical conference for discussing solutions that improve the collective manufacturing expertise of the semiconductor industry. Solving the challenges presented by semiconductor manufacturing is a combined effort by device makers, equipment and materials suppliers, and academics. ASMC provides an unparalleled platform for semiconductor professionals to network and learn the latest in the practical application of advanced manufacturing strategies and methodologies.

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