KLA Innovation: Broadband Plasma Optical Inspection for Chip Manufacturing

May 14, 2021

KLA’s broadband plasma optical patterned wafer defect inspection systems enable discovery of yield-critical defects on advanced memory and logic devices. With broadband plasma illumination, advanced optics and innovative design-aware technologies, these inspectors capture critical defects across a range of process layers at optical inspection sped, providing Discovery at the Speed of Light™.

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.