Advances in doped AlN deposition techniques for next generation PiezoMEMS

Jun 19, 2018

In this webinar we present a novel solution providing symmetrical control and adjustment of stress for AlN films with different Sc content.  We demonstrate excellent WIW stress performance, the ability to locally tune stress to compensate for centre to edge variations in Sc, and approaches to prevent formation of crystallite defects, maximizing yield.

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