KLA Instruments Group –
TMS, Booth 525
See our latest nanomechanical testers and optical profilers at TMS 2020

Latest offering from Nano Indenter® G200 series
- The Nano Indenter® G200X can be used for nanomechanical property measurements, scanning probe microscopy, high temperature measurements and conductive nanoindentation
- Applications include hardness, Young’s modulus, complex modulus of polymers, gels and biological tissue, and strain rate sensitivity of thin metallic films
- Optional applications include frequency-specific testing, quantitative scratch and wear testing, integrated probe-based imaging, high-temperature testing and custom test protocols

Profilm3D/Profilm3D-200: affordable, industry-standard optical profilers
- The Profilm3D family of optical profilers use industry-standard white-light-interferometry (WLI) and optional phase-shifting-interferometry (PSI) to produce high-quality surface profiles.
- Standard features include automated XY stage with 100 or 200mm travel, autofocus, four-position turret, tip/tilt stage, and 500um piezo travel.
- Applications: surface roughness, step heights, etch depth, dimensional measurements, and more.

Stylus Profilers | Optical Profilers | Nanoindenters | Thin Film Reflectometers

Visit our website for more information on our tool applications in both research and production environments.