Thin film failure
mechanisms quantified with nanoindentation from KLA.

Strain-induced thin film failure characterization via scratch testing.

Interface adhesion energy indentation measurements on low k films.

Want to learn more about nanoindentation techniques for thin films and coatings? Download the latest Application Note for KLA Nano Indenter® systems.


  • Precise nanoindenter and scratch measurements on thin films and coatings from micro to nano range of loads and displacements
  • Measure substrate-independent elastic modulus of thin films and coatings using AccuFilm™ thin film analysis
  • Fast indentation (1 indent/sec) and statistical analysis using NanoBlitz 3D for elastic modulus and stiffness mapping on thin films and coatings, including polymers, metals, semiconductor, low k dielectrics and more
  • Tribology and scratch adhesion testing and analysis
  • Ambient and in-situ nanoindentation systems for hardness testing based on the Oliver-Pharr technique
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  • Choose from an array of pre-programmed test methods such as ISO 14577 hardness, Continuous Stiffness Measurement (CSM) and Dynamic Constant Strain Rate (CSR), or create customized test methods for your unique material measurements
  • Take advantage of high-temperature nanoindentation to evaluate creep and other thin film mechanical properties
  • Access proprietary webinars taught by nanomechanical experts at KLA
  • Not sure of what you need? Let us introduce you to KLA’s full suite of nano and microindentation systems – Nano Indenter® G200X, iNano®, iMicro, InSEM® HT and NanoFlip
Product image of the Nano Indenter G200X