Tencor® P-170 Stylus Profiler

Tencor® P-170 Stylus Profiler

The Tencor P-170 stylus profiler is a cassette-to-cassette profiler offering step height measurement capability for steps from a few nanometers to one millimeter, for production environments. The profiler system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching. The Tencor P-170 has advanced pattern recognition algorithms, enhanced optics, and an advanced stage for robust performance and seamless recipe transportability between systems – a key requirement for a 24x7 production environment.

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