Tencor® Stylus Profilometers

Tencor® Stylus Profilometers

KLA Instruments™ Alpha-Step® stylus profilometers, Tencor® P-series stylus profilometers and HRP®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.

Upcoming Event

View All


KLA is proud to be a continuing Platinum sponsor and exhibitor at SEMICON West. We invite you to visit our experts at booth 833 to learn more about our sheet resistance mappers, contact and non-contact profiler and thin-film measurement

Event Date July 9 - 11, 2024
Location Moscone Center, San Francisco, CA
Booth 833
Alpha-Step D-600 Stylus Profiler

Alpha-Step® D-600 Stylus Profiler

The Alpha-Step D-600 stylus profiler adds a motorized X-Y stage to the Alpha-Step technology, enabling automated mapping of 2D and 3D step height, surface roughness measurements, plus 2D bow and stress.

Learn more

Tencor® P-7 Stylus Profiler

The Tencor P-7 stylus profiler leverages the industry-leading topography sensor and ultra-flat scanning technology of the Tencor P-17 in a platform that offers the best price to performance for a benchtop stylus profiler.

Learn more

Tencor® P-17 & Tencor® P-17 OF Stylus Profilers

The industry-leading Tencor P-17 is the latest generation benchtop stylus profiler built on over 45 years of surface metrology experience, providing precise 2D and 3D step height and surface roughness measurements for R&D and production environments.

Learn more

Alpha-Step D-500 Stylus Profiler

Alpha-Step® D-500 Stylus Profiler

The Alpha-Step D-500 is an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments.

Learn more

Tencor® P-170 Stylus Profiler

The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.

Learn more

HRP-260 Stylus Profiler

HRP®-260 Stylus Profiler

Built for high throughput and the reliability required in a production environment, the HRP-260 stylus profilometer combines high resolution, long scan capability and cassette-to-cassette wafer handling.

Learn more

Looking for optical surface profilometers?

View More

Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.



Timeline of Innovation

Since the launch of the Alpha-Step 100 stylus profilometer in 1977, our technical experts have continued to bring key innovations such as advanced topography sensors, ultra-flat scanning stages and fully automated measurement capability to market. Our tools continue to evolve, providing repeatable and accurate measurements for your surface metrology requirements. Learn more about the rich history of innovation of our stylus profilers.

Learn More

Receive the latest KLA Instruments news, papers, events, and more

Instruments Form
Data Transfer *
Marketing *

Follow KLA Instruments

Follow KLA Instruments to engage with our experts and learn about our tool applications.

Learn how our products can help you.

Explore More Solutions

KLA Instruments Logo


For industry experts, academics and other innovators, KLA Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.

HRP-260 Stylus Profiler

Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.

HRP-260 Stylus Profiler

Sheet Resistance Measurement

The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise.

HRP-260 Stylus Profiler


The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

HRP-260 Stylus Profiler

Optical Profilers

The Profilm3D® and Zeta optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot measurement techniques.

HRP-260 Stylus Profiler

Thin-Film Thickness Reflectometers

The Filmetrics® thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.


Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.