Sheet Resistance Measurement

Sheet Resistance Measurement

The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. Since the introduction of our first resistivity gauge in 1975, we have revolutionized both sheet resistance measurement and thickness measurement for conductive layers. The R50 measures metal layer thickness, sheet resistance and sheet conductance. The R54-series – the latest innovation in KLA sheet resistance and conductivity mapping systems – adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.

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Filmetrics R50-4PP Resistance Mapper

Filmetrics R50-4PP

The Filmetrics R50-4PP contact four-point probe system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The 10-decade measurement capability and large Z range make the R50-4PP ideal for a wide variety of applications.

The Filmetrics R50-200-4PP is also available to accommodate larger sample sizes.

Filmetrics R50-EC Resistance Mapper

Filmetrics R50-EC

The Filmetrics R50-EC non-contact eddy current system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The non-contact eddy current sheet resistance measurement is ideal for measuring resistance and film thickness on sensitive and/or flexible conductive surfaces.

The Filmetrics R50-200-EC is also available to accommodate larger sample sizes.

Filmetrics R54-200 Resistance Mapper System

Filmetrics R54-200

The Filmetrics R54-200 advanced sheet resistance mapping systems deliver R50 performance capability within a light-tight enclosure with additional capability to support semiconductor and compound semiconductor applications, including implant and epitaxial wafers.

The Filmetrics R54-200 can be configured as either direct four-point probe (R54-200-4PP) or non-contact eddy current system (R54-200-EC).

Filmetrics R54-300 Resistance Mapping System

Filmetrics R54-300

The Filmetrics R54-300 advanced sheet resistance mapping system configuration maintains the small footprint of the 200mm system by employing a high precision X-Y-θ stage for superior edge exclusion and high-density mapping. The R54-300 delivers process optimization metrology in a compact benchtop package.

The Filmetrics R54-300 can be configured as either direct four-point probe (R54-300-4PP) or non-contact eddy current (R54-300-EC).

Looking for sheet resistance measurement tools for semiconductor chip manufacturing?

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Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.



Timeline of Innovation

Our history of innovation and deep expertise have built a broad portfolio of measurement and inspection solutions that address every requirement and environment. See how it all started from the inception of the Alpha-Step® product line in 1977 through our latest product innovations.

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Filmetrics R54-300 Resistance Mapping System

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