Sheet Resistance Measurement

Sheet Resistance Measurement

The Filmetrics® sheet resistance measurement instruments have been developed based on over 45 years of resistance measurement innovation. From the introduction of the ADE 6035 resistivity gauge in 1975 to technology developed by Tencor Instruments, Prometrix and Filmetrics, the R50 is a culmination of combined technical expertise to deliver the R-Series sheet resistance metrology tools.

Filmetrics R50-4PP

The Filmetrics R50-4PP contact four-point probe system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The 10-decade measurement capability and large Z range make the R50-4PP ideal for a wide variety of applications.

The Filmetrics R50-200-4PP is also available to accommodate larger sample sizes.

Download Brochure

Filmetrics R50-EC

The Filmetrics R50-EC non-contact eddy current system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The non-contact eddy current sheet resistance measurement is ideal for measuring resistance and film thickness on sensitive and/or flexible conductive surfaces.

The Filmetrics R50-200-EC is also available to accommodate larger sample sizes.

Download Brochure

Looking for sheet resistance measurement tools for semiconductor chip manufacturing?

View More

Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.



Timeline of Innovation

Our history of innovation and deep expertise have built a broad portfolio of measurement and inspection solutions that address every requirement and environment. See how it all started from the inception of the Alpha-Step® product line in 1977 through our latest product innovations.

Learn More

Receive the latest KLA Instruments news, papers, events, and more

Instruments Form
Data Transfer *

Follow KLA Instruments

Follow KLA Instruments to engage with our experts and learn about our tool applications.

Learn how our products can help you.

Explore More Solutions

KLA Instruments Logo


For industry experts, academics and other innovators, KLA Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.

Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.


The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

Optical Profilers

The Profilm3D® and Zeta optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot measurement techniques.

Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

Thin-Film Thickness Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.


Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.