Optical Profilometers
Optical Profilometers
Profilm3D® and Zeta™ optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot™ confocal grid structured illumination. KLA Instruments can help guide you to the right profiler solution for your unique needs.
Filmetrics® Profilm3D® Optical Profilometer
The Profilm3D® benchtop optical profiler utilizes white light interferometry, TotalFocus™ infinite depth-of-field imaging, or Enhanced Roughness Mode to provide easy, non-contact measurement of 3D step heights, roughness, and other surface topography.
Zeta™-20 Optical Profiler
The Zeta-20 benchtop optical profilometer features patented ZDot™ technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.
Zeta™-300 Optical Profiler
Building upon the proven performance of the Zeta-20, the Zeta-300 optical profiler includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements.
Zeta™-388 Optical Profiler
The Zeta-388 optical profiler combines the Zeta-300 system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.
Looking for stylus surface profilometers?
View MoreTechnical Literature
Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.
Timeline of Innovation
The history of the optical profiler portfolio of KLA Instruments™ is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta™ Instruments developed ZDot™ and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the KLA Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.
Receive the latest KLA Instruments news, papers, events, and more
Follow KLA Instruments
Follow KLA Instruments to engage with our experts and learn about our tool applications.
Learn how our products can help you.
Explore More Solutions
Instruments
For industry experts, academics and other innovators, KLA Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.
Defect Inspectors
The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.
Nanoindenters
The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
Sheet Resistance Measurement
The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise.
Stylus Profilers
The Alpha-Step®, Tencor™ P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Thin-Film Thickness Reflectometers
The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.