ZetaScan 800 Defect Inspection System

ZetaScan 800 Defect Inspection System

ZetaScan 800 is a laser-based unpatterned wafer/glass panel defect inspection system that employs multi-channel detection technology for detection and classification of defects and particles on glass. The scanning beam optics combine high sensitivity and resolution to achieve full-surface coverage within a few minutes. The scans produce wafer maps that lead to automated defect classification for top and bottom particles on glass.

Ready to get started?

Contact Us

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.