Product Description
ZetaScan delivers high throughput glass panel inspection for display and solar applications, including top and bottom particles on glass, sliplines, pits, bumps, scratches, embedded defects, and film defects on GaAs. Macro and micro defect classification uses a combination of optical signatures and defect attributes. The ZetaScan inspection system’s high sensitivity offers a cost-effective solution suitable for both process development and high volume manufacturing process control.
Features
- Detects defects on glass wafers and panels
- Allows for manual load of wafer up to Gen2 size and 2.5mm in thickness
- Detects particles, scratches, pits, bumps stains and other surface defects
Use Cases
- Substrate quality control
- Incoming wafer quality control (IQC)
- Outgoing wafer quality control (IQC)
- CMP (chemical mechanical process) / polishing process control
- Wafer clean process control
- Process tool monitoring
