Product Description
The Candela 6300 series of optical surface analyzers harnesses patented multi-channel optics, combined with unique laser stability management technology, to deliver powerful optical surface metrology capabilities for edge roll-off, texture/polish uniformity, HDI characterization, and scratch and particle inspection. The inspection and metrology system’s leading-edge optical scanning technology enables full surface disk topography metrology in both radial and circumferential directions and allows manufacturers to use a single tool to measure the entire spatial spectrum. Increased laser power, a lower noise floor and new optics design eliminate the need for sputtering glass substrates for defect detection, allowing for identification of roughness variations of < 0.1Å.
Features
- Provides industry’s widest spatial bandwidth and lowest noise floor
- Measures circumferential, radial roughness and waviness
- Repeatable metrology correlates to AFM measurements on metal and glass media
- Provides fast and full-surface coverage on all disk form factors
- High sensitivity for faint scratches, stains and particle inspection
- Innovative Optical Surface Analysis (OSA) technology
- Available as manual (6310) or fully-automated (6340)
Use Cases
- Roughness and waviness analysis
- Defect inspection
- Scratch and ridge inspection
- Particle and stain inspection
- Microwaviness measurement
Options
- Precision diamond scribe
- Offline software
- Large form factor software license
