Automated Metrology
Automated Metrology
KLA Instruments™ automated metrology systems enable fab process control to quantify material deposited/removed, surface topography/roughness, critical dimensions and automated optical inspection (AOI). Applications include step height, film thickness and defect inspection/review. These KLA Instruments metrology tools provide automation for production environments and include the HRP®-260 and Tencor® P-170 stylus profilers, the Zeta™-388 optical profiler and the Filmetrics® F60-c film thickness mapper.
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Zeta™-388 Optical Profiler
The Zeta-388 3D surface topography measurement system combines the Zeta-300 non-contact 3D optical profiler system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.
Tencor® P-170 Stylus Profiler
The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.
HRP®-260 Stylus Profiler
Built for high throughput and the reliability required in a production environment, the HRP-260 stylus profilometer combines high resolution, long scan capability and cassette-to-cassette wafer handling.
Filmetrics® F60-c Automated Film Thickness Mapper
The F60-c is a fully automated cassette-to-cassette metrology system for measuring film thickness on unpatterned production or monitor wafers. Seven configurations cover film thickness from 5nm up to 3mm.
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Instruments
For industry experts, academics and other innovators, KLA Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.
Filmetrics® Thin-Film Thickness Measurement Systems
The Filmetrics® thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, for both benchtop and production environments.
Filmetrics® Sheet Resistance Measurement Systems
The Filmetrics® benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise.
Filmetrics® and Zeta™ Optical Profilers
The Filmetrics® Profilm3D® and Zeta™ optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot™ measurement techniques for R&D and production environments.
Stylus Profilers
The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Nanoindenters
The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.