The F54 Film Thickness Mapping System

Mar 12, 2024

The Filmetrics®️️ F54 film supports thin film thickness mapping system for samples up to 450mm in diameter. Film thickness uniformity is mapped quickly and easily with the F54 advanced spectral reflectance system. The motorized r-theta stage moves automatically according to specified sampling patterns to produce 2D and 3D film thickness maps.

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.