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MEMS Conference

KLA is an exhibitor at MEMS 2025. Please visit us at booth #16. The SPTS division will present its innovative solutions for MEMS manufacturing, focusing on HF & XeF2 vapor release etch, MVD, Si DRIE, PECVD and PVD.

IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2025) is one of the premier annual events reporting research results on every aspect of Microsystems technology. This year, IEEE MEMS 2025 will bring more industrial elements to broaden the impact towards various application scenarios, showing its significance on more-than-Moore era.

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